Laser Microfabrication for Silicon Restrictor
نویسندگان
چکیده
منابع مشابه
Addressable microlens array for parallel laser microfabrication.
Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off for fabrication. In addition, the technique allows for homogenizing the intensity of the array of ...
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ژورنال
عنوان ژورنال: Journal of Korean Powder Metallurgy Institute
سال: 2008
ISSN: 1225-7591
DOI: 10.4150/kpmi.2008.15.1.046